Specification of a Software Architecture and Protocols for Automated VLSI Manufacturing System Operation자동화된 VLSI 생산 시스템 운용을 위한 소프트웨어 구조 및 프로토콜 설계
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, J.H. | ko |
| dc.contributor.author | Kim, J.W. | ko |
| dc.contributor.author | Kwon, W.H. | ko |
| dc.date.accessioned | 2013-02-28T04:03:25Z | - |
| dc.date.available | 2013-02-28T04:03:25Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997 | - |
| dc.identifier.citation | 제어,자동화,시스템공학 논문지, v.3, no.1, pp.94 - 100 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/72684 | - |
| dc.language | English | - |
| dc.publisher | 제어,자동화,시스템공학회 | - |
| dc.title | Specification of a Software Architecture and Protocols for Automated VLSI Manufacturing System Operation | - |
| dc.title.alternative | 자동화된 VLSI 생산 시스템 운용을 위한 소프트웨어 구조 및 프로토콜 설계 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 3 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 94 | - |
| dc.citation.endingpage | 100 | - |
| dc.citation.publicationname | 제어,자동화,시스템공학 논문지 | - |
| dc.contributor.localauthor | Park, J.H. | - |
| dc.contributor.nonIdAuthor | Kim, J.W. | - |
| dc.contributor.nonIdAuthor | Kwon, W.H. | - |
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