Self-calibration of High Frequency Errors of Test Optics by N-step Rotation

Abstract

We propose an extended version of multi-step algorithm of self-calibration of interferometric optical testing instruments. The key idea is to take wavefront measurements with near equal steps in that a slight angular offset is intentionally provided in part rotation. This generalized algorithm adopts least squares technique to determine the true azimuthal positions of part rotation and consequently eliminates calibration errors caused by rotation inaccuracy. In addition, the required numbers of part rotation is greatly reduced when higher order spatial frequency terms are of particular importance.