Formation of Self-aligned Holes in an Arbitrary pattern in Silicon Substrate
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | H.D.Lee | ko |
| dc.contributor.author | H.J.Lee | ko |
| dc.contributor.author | Kim, Choong Ki | ko |
| dc.contributor.author | C.H.Han | ko |
| dc.date.accessioned | 2013-02-28T00:40:14Z | - |
| dc.date.available | 2013-02-28T00:40:14Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-06 | - |
| dc.identifier.citation | APPLIED PHYSICS LETTERS, v.66, no.24, pp.3272 - 3274 | - |
| dc.identifier.issn | 0003-6951 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/71796 | - |
| dc.language | English | - |
| dc.publisher | Amer Inst Physics | - |
| dc.subject | WATER | - |
| dc.title | Formation of Self-aligned Holes in an Arbitrary pattern in Silicon Substrate | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1995RC25900012 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 66 | - |
| dc.citation.issue | 24 | - |
| dc.citation.beginningpage | 3272 | - |
| dc.citation.endingpage | 3274 | - |
| dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
| dc.identifier.doi | 10.1063/1.113401 | - |
| dc.contributor.localauthor | C.H.Han | - |
| dc.contributor.nonIdAuthor | H.D.Lee | - |
| dc.contributor.nonIdAuthor | H.J.Lee | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordPlus | WATER | - |
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