고상 에피택시에 의한 초박막 CoSi2 형성과 Si/epi-CoSi2/Si(111)의 이중헤테로 에피택셜 성장Formation of CoSi2 Film and Double Heteroepitaxial Growth of Si/CoSi2/Si(111) by Solid Phase Epitaxy
- Publisher
- 한국재료학회
- Issue Date
- 1998-12
- Language
- Korean
- Citation
한국재료학회지, v.8, no.2, pp.165 - 172
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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