An optomechanical pressure sensor using multimode interference couplers
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hah, D | ko |
| dc.contributor.author | Yoon, E | ko |
| dc.contributor.author | Hong, Songcheol | ko |
| dc.date.accessioned | 2013-02-27T22:26:34Z | - |
| dc.date.available | 2013-02-27T22:26:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-04 | - |
| dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.38, no.4B, pp.2664 - 2668 | - |
| dc.identifier.issn | 0021-4922 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/71200 | - |
| dc.description.abstract | A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p(+)-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 x 13 mm(2) by using a MMI coupler, and the total thickness of the membrane is 5.9 mu m. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors. | - |
| dc.language | English | - |
| dc.publisher | JAPAN J APPLIED PHYSICS | - |
| dc.title | An optomechanical pressure sensor using multimode interference couplers | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000082871300107 | - |
| dc.identifier.scopusid | 2-s2.0-0038707140 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 38 | - |
| dc.citation.issue | 4B | - |
| dc.citation.beginningpage | 2664 | - |
| dc.citation.endingpage | 2668 | - |
| dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS | - |
| dc.contributor.localauthor | Hong, Songcheol | - |
| dc.contributor.nonIdAuthor | Hah, D | - |
| dc.contributor.nonIdAuthor | Yoon, E | - |
| dc.type.journalArticle | Article; Proceedings Paper | - |
| dc.subject.keywordAuthor | optomechanical pressure sensor | - |
| dc.subject.keywordAuthor | multimode interference couplers | - |
| dc.subject.keywordAuthor | p(+)-Si membrane | - |
| dc.subject.keywordAuthor | strip-loaded silica waveguide | - |
| dc.subject.keywordAuthor | photoelastic effect | - |
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