결정봉 회전 가속화 기법에 의한 초크랄스키 결정 성장

Abstract

A laboratory experiment was made of a control of temperature oscillation in Czochralski convection. Numerical computation was also made to delineate the control of temperature oscillation. The suppression of temperature oscillation was achieved by varying the rotation rate of crystal rod ($\Omega=\Omega_0(1+A sin 2{\pi}ft/t_p)$), where A denotes the amplitude of rotation rate and f the frequency factor. Based on the inherent dimesionless time period of temperature oscillation ($t_p$), the suppression rate of temperature oscillation was characterized by the mixed convection parameter ($0.217{\leq}Ra/PrRe^2{\leq}1.658$). The optimal values of A and f were also scrutinized. To understand the suppression mechanism of temperature oscillation, the controls of isotherm(θ) and equi-vorticity(ω) were investigated.