Pt/RuO2 hybrid bottom electrodes and their effects on the electrical properties of (Ba,Sr)TiO3 thin films

Abstract

Thin platinum layer of 100 Angstrom thickness was used for the modification of the interface state between (Ba,Sr)TiO3 (BST) thin films and RuO2 bottom electrodes. Pt/RuO2 hybrid bottom electrodes were fabricated with various platinum deposition temperatures by a conventional de magnetron sputtering method. Although the surface morphology and X-ray diffraction (XRD) patterns of BST thin films were not changed, the electrical properties of BST films deposited on Pt/RuO2 hybrid electrodes were improved compared to the films on RuO2 electrodes. Dielectric constant (epsilon(r)) and leakage current density of the 1000 Angstrom thick BST thin films on Pt/RuO2 hybrid electrodes prepared at the platinum deposition temperature of 400 degrees C were 498 and 8.6 x 10(-8) A/cm(2) at 1.5 V, respectively.