Growth conditions of c-axis normal Y(1)Ba(2)Cu(3)O7-delta films on 20 degrees tilted crystalline substrates
Growth conditions of Y1Ba2Cu3O7-delta (YBCO) films on substrates whose crystalline axes were tilted by 20 degrees with respect to their surfaces were investigated. Yttria-stabilized zirconia (YSZ) and CeO2 were deposited for buffer layers. The important parameters for c-axis normal and in-plane axes aligned growth of YBCO overlayer were the thickness of the buffer layer and deposition temperature. High quality YBCO film was obtained with the optimized values of these parameters. (C) 1997 Elsevier Science S.A.
- Publisher
- ELSEVIER SCIENCE SA LAUSANNE
- Issue Date
- 1997-08
- Language
- English
- Article Type
- Article
- Keywords
YTTRIA-STABILIZED ZIRCONIA; THIN-FILMS; YBA2CU3O7-DELTA
- Citation
THIN SOLID FILMS, v.305, no.1-2, pp.304 - 308
- ISSN
- 0040-6090
- Appears in Collection
- PH-Journal Papers(저널논문)
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