실리콘 식각 공정시 발생하는 격자결함 관찰 및 제거동향 연구Lattice Damage Produced during Silicon Etch Process and Its Recovery Phenomena
- Publisher
- 한국재료학회
- Issue Date
- 1996-12
- Language
- Korean
- Citation
한국재료학회지, v.6, no.5, pp.524 - 531
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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