DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, ST | ko |
dc.contributor.author | Kim, Jin-Baek | ko |
dc.contributor.author | Jung, MH | ko |
dc.contributor.author | Ahn, KD | ko |
dc.date.accessioned | 2013-02-27T18:44:39Z | - |
dc.date.available | 2013-02-27T18:44:39Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997 | - |
dc.identifier.citation | POLYMER BULLETIN, v.39, no.4, pp.423 - 430 | - |
dc.identifier.issn | 0170-0839 | - |
dc.identifier.uri | http://hdl.handle.net/10203/70180 | - |
dc.description.abstract | N-(10-Camphorsulfonyloxy)maleimide (CSOMI) have been copolymerized with two t-BOC protected vinyllactams, 3-(t-butoxycarbonyl)-1-vinyl-2-pyrrolidinone (BCVP) and 3-(t-butoxycarbonyl)-1-vinylcaprolactam (BCVC) to make photoacid-generating polymers P(CSOMI/BCVP) and P(CSOMI/BCVC), respectively. The thermal and photoacidolytic deprotection of the t-BOG protected copolymers readily underwent by UV exposure and solubilities of the polymers were remarkably changed thereafter. The polymers were proved to have the capability of a single-component, chemically amplified resist system in the deep-UV region without addition of any photoacid generator, because the polymers themselves photochemically generate a bulky 10-camphorsulfonic acid (SCA). The polymer films gave positive tone images by irradiation with electron beam (EB) and development with aqueous base solutions. | - |
dc.language | English | - |
dc.publisher | SPRINGER | - |
dc.subject | CHEMICAL AMPLIFICATION | - |
dc.subject | POLYMERS | - |
dc.title | Copolymers of camphorsulfonyloxymaleimide and t-BOC protected vinyllactams for applications as single-component resists | - |
dc.type | Article | - |
dc.identifier.wosid | A1997YD33300005 | - |
dc.identifier.scopusid | 2-s2.0-0343432108 | - |
dc.type.rims | ART | - |
dc.citation.volume | 39 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 423 | - |
dc.citation.endingpage | 430 | - |
dc.citation.publicationname | POLYMER BULLETIN | - |
dc.contributor.localauthor | Kim, Jin-Baek | - |
dc.contributor.nonIdAuthor | Kim, ST | - |
dc.contributor.nonIdAuthor | Jung, MH | - |
dc.contributor.nonIdAuthor | Ahn, KD | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | CHEMICAL AMPLIFICATION | - |
dc.subject.keywordPlus | POLYMERS | - |
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