마이크로 게이지를 이용한 다결정 실리콘 박막의 열팽창계수의 측정Measurement of Thermal Expansion Coefficient of Poly-Si Thin Film Using Microgauge
- Publisher
- 한국재료학회
- Issue Date
- 1998-01
- Language
- Korean
- Citation
한국재료학회지, v.8, no.1, pp.85 - 91
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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