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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Comparative study of residual stresses measurement methods on CVD diamond films

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Kim, JG / Yu, Jinresearcher
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Issue Date
1998-08
Language
English
Article Type
Article
Keywords

CHEMICAL-VAPOR-DEPOSITION; INTRINSIC STRESS; THIN-FILM; RAMAN; STRAIN

Citation

SCRIPTA MATERIALIA, v.39, no.6, pp.807 - 814

ISSN
1359-6462
DOI
10.1016/S1359-6462(98)00182-1
URI
http://hdl.handle.net/10203/70115
Appears in Collection
MS-Journal Papers(저널논문)
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