Browse "College of Engineering(공과대학)" by Subject ruthenium

Showing results 1 to 8 of 8

1
A New Energy-Saving Catalytic System: Carbon Dioxide Activation by a Metal/Carbon Catalyst

Yun, Danim; Park, Dae Sung; Lee, Kyung Rok; Yun, Yang Sik; Kim, Tae Yong; Park, Hongseok; Lee, Hyunjoo; et al, CHEMSUSCHEM, v.10, no.18, pp.3671 - 3678, 2017-09

2
(A) study on the fabrication and characteristics of ruthenium nanocrystal formed by atomic layer deposition = 원자층 증착법을 이용한 루테늄 나노크리스탈의 증착과 전기적 특성에 관한 연구link

Oh, Heung-Ryong; 오흥룡; et al, 한국과학기술원, 2008

3
Atomic-Scale Homogeneous Ru-Cu Alloy Nanoparticles for Highly Efficient Electrocatalytic Nitrogen Reduction

Kim, Chansol; Song, Ji-Yoon; Choi, Changhyeok; Ha, Jin Pil; Lee, Wonmoo; Nam, Yoon Tae; Lee, Dong-myeong; et al, ADVANCED MATERIALS, v.34, no.40, 2022-10

4
Chemical effect of dry and wet cleaning of the Ru protective layer of the extreme ultraviolet lithography reflector

Belau, L; Park, JeongYoung; Liang, T; Seo, H; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.27, no.4, pp.1919 - 1925, 2009-07

5
Electrochemically Enhanced Wet Cleaning of Ru Capping Thin Film for EUV Lithography Reflector

Seo, H; Park, JeongYoung; Liang, T; Somorjai, GA, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.157, no.4, pp.414 - 419, 2010

6
Electromigration Reliability of Barrierless Ruthenium and Molybdenum for Sub-10 nm Interconnection

Kim, Jungkyun; Rhee, Hakseung; Son, Myeong Won; Park, Juseong; Kim, Gwangmin; Song, Hanchan; Kim, Geunwoo; et al, ACS APPLIED ELECTRONIC MATERIALS, v.5, no.5, pp.2447 - 2453, 2023-04

7
Improved oxidation resistance of Ru/Si capping layer for extreme ultraviolet lithography reflector

Park, JeongYoung; Belau, L; Seo, H; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.29, no.4, 2011-07

8
The effects of oxygen plasma on the chemical composition and morphology of the Ru capping layer of the extreme ultraviolet mask blanks

Belau, L; Park, JeongYoung; Liang, T; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.26, no.6, pp.2225 - 2229, 2008-11

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