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Browse "College of Engineering(공과대학)" by Subject oxide thin-film transistors (TFTs)▼aelectron cyclotron resonance (ECR) sputtering▼ahigh density▼aindium-tin-zinc oxide (ITZO)▼acurrent stress

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(The) properties of high mobility oxide TFT with indium-tin-zinc oxide active layer deposited by using electron cyclotron resonance sputtering method = 전자사이클로트론 공명 스퍼터로 증착한 고이동도 인듐-주석-아연 산화물 활성층 및 트랜지스터 특성link

Ahn, Jae Han; Park, Sang Hee; et al, 한국과학기술원, 2017

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