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RPCVD에 의해 증착된 $Si_3N_4/SiO_2/SiON$ 박막들의 MMIC\&OEIC 응용에 관한 연구 = Study for the application of $Si_3N_4/SiO_2/SiON$ films deposited by RPCVD to MMIC\&OEIClink 이종주; Lee, Jong-Joo; et al, 한국과학기술원, 1997 |
The enhancement of Q factor in RPCVD SiGe varactors by the structural modification of the base-collector junction Mheen, B; Suh, D; Kim, SH; Shim, KH; Kang, JY; Hong, Songcheol, IEEE ELECTRON DEVICE LETTERS, v.24, no.4, pp.239 - 241, 2003-04 |
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