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Browse "College of Engineering(공과대학)" by Subject DRAM cell capacitor▼aHfZrO2▼aE-field cycling▼aMorphotropic Phase Boundary▼ak-value

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DRAM 셀 커패시터 적용을 위한 낮은 온도의 열처리 및 E-field cycling을 통한 HfxZryO2의 k값 개선 = Improvement of k-value of HfxZryO2 through low temperature annealing and electric field cycling for dram cell capacitor applicationlink

문선국; 조병진; et al, 한국과학기술원, 2021

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