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Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology Park, Kun-Sik; Baik, Kyu-Ha; Kim, Dong-Pyo; Woo, Jong-Chang; No, Kwang-Soo; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.11, no.2, pp.1625 - 1628, 2011-02 |
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