Browse "College of Engineering(공과대학)" by Author Morrison J.R.
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| Control of wafer release in multi cluster tools Park, Kyung Soo; Morrison J.R., 2010 8th IEEE International Conference on Control and Automation, ICCA 2010, pp.1481 - 1487, 2010-06-09 |
| Wafer admission control for clustered photolithography tools Park, Kyung Soo; Morrison J.R., 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010, pp.220 - 225, 2010-07-11 |
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