Browse "College of Engineering(공과대학)" by Author Im, Kiju

Showing results 1 to 2 of 2

1
Fabrication of 50 nm trigate silicon on insulator metal-oxide-silicon field-effect transistor without source/drain activation annealing

Im, Kiju; Cho, Won-Ju; Ahn, Chang-Geun; Yang, Jong-Heon; Oh, Jihun; Lee, Seongjae; Hwang, Hyunsang, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.43, no.5A, pp.2438 - 2441, 2004-05

2
Plasma doping technology for fabrication of nanoscale metal-oxide-semiconductor devices

Cho, Won-ju; Im, Kiju; Ahn, Chang-Geun; Yang, Jong-Heon; Oh, Jihun; Baek, In-Bok; Lee, Seongjae, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.22, no.6, pp.3210 - 3213, 2004-11

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