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Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics 안현준; 문정민; 김용준; 노일철; 김춘환; 조병진, 24th Korean Conference on Semiconductors, SK Hynix, 2017-02-14 |
Work Function Tuning of Titanium Nitride Gate Electrode Employing Atomic Layer Deposition for PMOS Devices 문정민; 안현준; 노일철; 김춘환; 조병진, 24th Korean Conference on Semiconductors, SK Hynix, 2017-02-14 |
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