Showing results 4 to 6 of 6
Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization Cho, Byung Jin; Poon, D; Tan, LS; Bhat, M; See, A, IEEE 4th International Workshop on Junction Technology (IWJT-2004), pp.22 - 26, 2004-03-15 |
Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation Poon, CH; Cho, Byung Jin; Lu, YF; Bhat, M; See, A, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.21, no.2, pp.706 - 709, 2003-02 |
Process optimization for multiple-pulse laser annealing of boron implanted silicon with germanium pre-amorphization Cho, Byung Jin; Poon, D; Lu, YF; Bhat, M; See, A, MRS Spring Meeting, pp.0 - 0, 2003-04-22 |
Discover