Showing results 2 to 5 of 5
Effect of temperature and substrate on the growth behaviors of chemical vapor deposited Al films with dimethylethylamine alane source Jang, TW; Moon, W; Baek, JT; Ahn, Byung Tae, THIN SOLID FILMS, v.333, no.1-2, pp.137 - 141, 1998-11 |
Effects of deposition parameters on composition, structure, resistivity and step coverage of TiN thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition Kim, JS; Lee, EJ; Baek, JT; Lee, Won-Jong, THIN SOLID FILMS, v.305, no.1-2 , pp.103 - 109, 1997-04 |
LPCVD 공정의 3차원 증착형상 예측을 위한 전산모사 = Simulation for the 3-D deposition topography of LPCVD processlink 권의희; Kwon, Ui-Hui; et al, 한국과학기술원, 2000 |
원자층증착법으로 제조한 Zn1-xMgxO 박막을 버퍼층으로 이용한 Cd-free CIGS 태양전지의 성능 향상에 관한 연구 = Performance improvement of Cd-free CIGS solar cells using Zn1-xMgxO buffer layers deposited by atomic layer depositionlink 이창수; Lee, Chang-Soo; et al, 한국과학기술원, 2013 |
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