Interfacial fracture energy measurements in the Cu/Cr/polyimide system

Abstract

The interfacial fracture energies, Gamma, of the Cu/Cr/polyimide system were deduced under varying Cu film thickness and pretreatment conditions based on two methods: X-ray measurement by Park and Yu and theoretical methods by Moidu et al. The two methods showed reasonable agreement for most cases, imparting validity for both approaches. Estimated Gamma values were quite independent of the metal film thickness and increased with the rf plasma power density of polyimide pretreatment as expected. Estimated values of Gamma were 46.8 +/- 17.8, 170.3 +/- 42.9 and 253.9 +/- 44.4 J m(-2) for the rf plasma power density of 0.03, 0.036 and 0.05 W cm(-2), respectively. (C) 1999 Elsevier Science S.A. All rights reserved.