Effect of oxygen plasma treatment on hydrogen-damaged Pt/Pb(ZrxTi1-x)O-3/Pt ferroelectric thin-film capacitor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | young-soo park | ko |
| dc.contributor.author | june key lee | ko |
| dc.contributor.author | ilsub chung | ko |
| dc.contributor.author | Lee, Jai Young | ko |
| dc.date.accessioned | 2013-02-27T16:22:29Z | - |
| dc.date.available | 2013-02-27T16:22:29Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.38, no.5B, pp.L577 - L579 | - |
| dc.identifier.issn | 0021-4922 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/69568 | - |
| dc.description.abstract | Electron cyclotron resonance (ECR) oxygen plasma treatment of the Pt/Pb(ZrxTi1-x)O-3/Pt capacitor was attempted to reduce the property degradation due to hydrogen. It was found that oxygen plasma treatment using ECR modifies the surface of Pt electrodes. Surface modification deteriorates catalytic activity of Pt electrodes, thereby significantly improving ferroelectric properties such as remnant polarization and leakage current. It seems that highly reactive oxygen radicals in ECR plasma play an important role in deteriorating the catalytic activity of Pt electrodes. | - |
| dc.language | English | - |
| dc.publisher | JAPAN J APPLIED PHYSICS | - |
| dc.subject | DEGRADATION | - |
| dc.subject | PB(ZR,TI)O-3 | - |
| dc.title | Effect of oxygen plasma treatment on hydrogen-damaged Pt/Pb(ZrxTi1-x)O-3/Pt ferroelectric thin-film capacitor | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000081582600009 | - |
| dc.identifier.scopusid | 2-s2.0-0032653902 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 38 | - |
| dc.citation.issue | 5B | - |
| dc.citation.beginningpage | L577 | - |
| dc.citation.endingpage | L579 | - |
| dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | - |
| dc.identifier.doi | 10.1143/JJAP.38.L577 | - |
| dc.contributor.nonIdAuthor | young-soo park | - |
| dc.contributor.nonIdAuthor | june key lee | - |
| dc.contributor.nonIdAuthor | ilsub chung | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordAuthor | PZT | - |
| dc.subject.keywordAuthor | Pt | - |
| dc.subject.keywordAuthor | ECR oxygen plasma | - |
| dc.subject.keywordAuthor | H-2 annealing | - |
| dc.subject.keywordPlus | DEGRADATION | - |
| dc.subject.keywordPlus | PB(ZR,TI)O-3 | - |
- Appears in Collection
- Files in This Item
- There are no files associated with this item.
This item is cited by other documents in WoS
| ⊙ Detail Information in WoSⓡ | Click to see |  |
| ⊙ Cited 6 items in WoS | Click to see citing articles in |  |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.