Effect of Nitrogen doping on field emission characteritics of patterned diamond-like carbon films prepared by pulsed laser deposition

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Publisher
IEEE
Issue Date
2000-01
Language
English
Citation

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY - SECTION B - MICROELECTRONICS NANOMETER STRUCTUR, v.0, no.2, pp.1027 - 1030

ISSN
0734-211X
URI
http://hdl.handle.net/10203/69146
Appears in Collection
MS-Journal Papers(저널논문)
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