고상 에피택셜 성장에 의한 PtSi 박막의 형성The Formation of Epitaxial PtSi Films on Si(100) by Solid Phase Epitaxy
- Publisher
- 한국진공학회
- Issue Date
- 1995-12
- Language
- Korean
- Citation
한국진공학회지, v.4, no.3, pp.319 - 326
- ISSN
- 1225-8822
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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