증착온도와 La조성비가 ECR 플라즈마 화학기상증착법으로 증착한 (Pb, La)TiO3 박막의 물성에 미치는 영향The effect of the deposition temperature and La doping concentration on the properties of the (Pb,La)TiO3 films deposited by ECR PECVD

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dc.contributor.author정성웅ko
dc.contributor.author박혜련ko
dc.contributor.author이원종ko
dc.date.accessioned2013-02-27T11:29:07Z-
dc.date.available2013-02-27T11:29:07Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1997-04-
dc.identifier.citationKOREAN JOURNAL OF MATERIALS RESEARCH, v.7, no.0, pp.196 - 202-
dc.identifier.issn1225-0562-
dc.identifier.urihttp://hdl.handle.net/10203/68274-
dc.languageKorean-
dc.publisherMaterials Research Society of Korea-
dc.title증착온도와 La조성비가 ECR 플라즈마 화학기상증착법으로 증착한 (Pb, La)TiO3 박막의 물성에 미치는 영향-
dc.title.alternativeThe effect of the deposition temperature and La doping concentration on the properties of the (Pb,La)TiO3 films deposited by ECR PECVD-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume7-
dc.citation.issue0-
dc.citation.beginningpage196-
dc.citation.endingpage202-
dc.citation.publicationnameKOREAN JOURNAL OF MATERIALS RESEARCH-
dc.contributor.localauthor이원종-
dc.contributor.nonIdAuthor정성웅-
dc.contributor.nonIdAuthor박혜련-
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MS-Journal Papers(저널논문)
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