ECR PECVD법으로 증착된 lead titanate박막의 조성과 미세구조에 대한 증착변수의 영향The Effects of Process Parameters on the Composition and Microstructure of Lead Titanate Thin Films deposited by ECR PECVD
- Publisher
- 한국재료학회
- Issue Date
- 1997-04
- Language
- Korean
- Citation
한국재료학회지, v.7, no.2, pp.93 - 101
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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