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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

초정밀 작업을 위한 6자 유도 마이크로 스테이지의 개발

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김경찬 / 김수현 / 곽윤근researcher
Publisher
대한기계학회
Issue Date
1998
Language
Korean
Citation

대한기계학회논문집 A, v.22, no.2, pp.372 - 379

ISSN
1226-4873
URI
http://hdl.handle.net/10203/68133
Appears in Collection
ME-Journal Papers(저널논문)
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