DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Young-Ho | ko |
dc.contributor.author | PISANO, AP | ko |
dc.contributor.author | HOWE, RT | ko |
dc.date.accessioned | 2013-02-27T04:53:09Z | - |
dc.date.available | 2013-02-27T04:53:09Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1994-06 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.3, no.2, pp.81 - 87 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/66541 | - |
dc.description.abstract | Viscous energy loss in oscillating fluid-film dampers that provide frictional shear for laterally-driven planar microstructures is investigated. It is found that Stokes-type fluid motion models viscous damping more accurately than Couette-type flow field. This paper characterizes the damping property of a fluid layer in terms of viscous energy dissipation, then derives analytic damping formulae for practical Q estimation. Theoretical Q-factors are compared to the experimental values, measured from surface-micromachined polysilicon resonators. Data reported by previous investigators are also analyzed and compared. The experimental results indicate that the Stokes-type damping model presents a more general damping treatment with better Q estimation, although discrepancies of 10 to 20% still remain between the estimated and measured Q. [59] | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | VISCOUS DAMPING MODEL FOR LATERALLY OSCILLATING MICROSTRUCTURES | - |
dc.type | Article | - |
dc.identifier.wosid | A1994PU08700005 | - |
dc.identifier.scopusid | 2-s2.0-0028445049 | - |
dc.type.rims | ART | - |
dc.citation.volume | 3 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 81 | - |
dc.citation.endingpage | 87 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | PISANO, AP | - |
dc.contributor.nonIdAuthor | HOWE, RT | - |
dc.type.journalArticle | Article | - |
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