DC Field | Value | Language |
---|---|---|
dc.contributor.author | CHOI, JH | ko |
dc.contributor.author | SONG, HJ | ko |
dc.contributor.author | Kim, Choong Ki | ko |
dc.date.accessioned | 2013-02-25T23:39:20Z | - |
dc.date.available | 2013-02-25T23:39:20Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1991-03 | - |
dc.identifier.citation | JOURNAL OF ELECTRONIC MATERIALS, v.20, no.3, pp.231 - 235 | - |
dc.identifier.issn | 0361-5235 | - |
dc.identifier.uri | http://hdl.handle.net/10203/66059 | - |
dc.description.abstract | Unsymmetric trapezoidal power distribution produced by a tungsten halogen lamp and a focusing mirror has been employed in zone-melting recrystallization of polysilicon. Focusing mirror is designed based on the ray-tracing method. Experimental results show that the trapezoidal type power distribution is superior to the Gaussian type which is obtained with a conventional strip heater, in that the controllability and reproducibility are significantly improved while the recrystallized film shows comparable or slightly better crystal quality. It has been found that a lower thermal gradient at the liquid-to-solid interface under a lower scan speed improves the quality of the recrystallized film prepared by the trapezoidal power distribution. | - |
dc.language | English | - |
dc.publisher | MINERALS METALS MATERIALS SOC | - |
dc.subject | SI FILMS | - |
dc.subject | SILICON | - |
dc.title | ZONE-MELTING RECRYSTALLIZATION OF POLYSILICON BY A FOCUSED-LAMP WITH UNSYMMETRIC TRAPEZOIDAL POWER DISTRIBUTION | - |
dc.type | Article | - |
dc.identifier.wosid | A1991FA82400004 | - |
dc.identifier.scopusid | 2-s2.0-0026117119 | - |
dc.type.rims | ART | - |
dc.citation.volume | 20 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 231 | - |
dc.citation.endingpage | 235 | - |
dc.citation.publicationname | JOURNAL OF ELECTRONIC MATERIALS | - |
dc.contributor.nonIdAuthor | CHOI, JH | - |
dc.contributor.nonIdAuthor | SONG, HJ | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | SOI | - |
dc.subject.keywordAuthor | ZMR | - |
dc.subject.keywordAuthor | TRAPEZOIDAL POWER DISTRIBUTION | - |
dc.subject.keywordPlus | SI FILMS | - |
dc.subject.keywordPlus | SILICON | - |
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