$SiO2위에 증착된 Si1-xGex합금의 증착온도 변화에 따른 결정성 및 미세구조에 관한 연구A Study of the Crystallinity and Microstructure of the Si1-xGex Alloys Deposited on the SiO2 at Various Temperatues

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Publisher
한국재료학회
Issue Date
1994-12
Language
Korean
Citation

한국재료학회지, v.4, no.4, pp.416 - 427

ISSN
1225-0562
URI
http://hdl.handle.net/10203/63650
Appears in Collection
MS-Journal Papers(저널논문)
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