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Results 1-1 of 1 (Search time: 0.002 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Self-diagnostic high-density silicon microprobe arrays fabricated by the corner compensated anisotropic etching of (110) silicon wafers

Lee, C; Cho, Young-Ho; Lee, K, SENSORS AND ACTUATORS A-PHYSICAL, v.122, pp.345 - 351, 2005-08

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