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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Self-diagnostic high-density silicon microprobe arrays fabricated by the corner compensated anisotropic etching of (110) silicon wafers Lee, C; Cho, Young-Ho; Lee, K, SENSORS AND ACTUATORS A-PHYSICAL, v.122, pp.345 - 351, 2005-08 |
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