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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns Schmidt, LE; Yi, S; Jin, YH; Leterrier, Y; Cho, Young-Ho; Manson, JAE, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.18, 2008-04 |
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