Search
Results 1-1 of 1 (Search time: 0.006 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Run-to-run overlay control of steppers in semiconductor manufacturing systems based on history data analysis and neural network modeling Park, Seong-Jin; Lee, Moon-Sang; Shin, Sung-Young; Cho, Kwang-Hyun; Lim, Jong-Tae; Cho, Bong-Su; Jei, Young-Ho; Kim, Myung-Kil; Park, Chan-Hoon, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.18, no.4, pp.605 - 613, 2005-11 |