텅스텐 램프를 이용한 실리콘 재결정시의 SOI 다층구조에 대한 열적모델A Thermal Model for Silicon-on-Insulator Multilayer Structure in Silicon Recrystallization Using Tungsten Lamp
- Publisher
- 대한전기학회
- Issue Date
- 1984-09
- Language
- English
- Citation
전기학회논문지, v.21, no.5, pp.90 - 99
- ISSN
- 1975-8359
- Appears in Collection
- EE-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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