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Results 1-1 of 1 (Search time: 0.003 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Intrinsic Mechanical Properties of Free-Standing SiNx Thin Films Depending on PECVD Conditions for Controlling Residual Stress

Oh, Seung Jin; Ma, Boo Soo; Yang, Chanhee; Kim, Taek-Soo, ACS APPLIED ELECTRONIC MATERIALS, v.4, no.8, pp.3980 - 3987, 2022-08

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