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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Tuning depth profiles of organosilicate films with ultraviolet curing Kim, Taek-Soo; Tsuji, Naoto; Matsushita, Kiyohiro; Kobayashi, Nobuyoshi; Chumakov, Dmytro; Geisler, Holm; Zschech, Ehrenfried; Dauskardt, Reinhold H., JOURNAL OF APPLIED PHYSICS, v.104, no.7, 2008-10 |