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Results 1-2 of 2 (Search time: 0.005 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Tuning depth profiles of organosilicate films with ultraviolet curing

Kim, Taek-Soo; Tsuji, Naoto; Matsushita, Kiyohiro; Kobayashi, Nobuyoshi; Chumakov, Dmytro; Geisler, Holm; Zschech, Ehrenfried; Dauskardt, Reinhold H., JOURNAL OF APPLIED PHYSICS, v.104, no.7, 2008-10

2
Tailoring UV cure depth profiles for optimal mechanical properties of organosilicate thin films

Kim, Taek-Soo; Chumakov, Dmytro; Zschech, Ehrenfried; Dauskardt, Reinhold H., APPLIED PHYSICS LETTERS, v.95, no.7, 2009-08

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