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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Surfactant Mobility in Nanoporous Glass Films Kim, Taek-Soo; Mackie, Katherine; Zhong, Qiping; Peterson, Maria; Konno, Tomohisa; Dauskardt, Reinhold H., NANO LETTERS, v.9, no.6, pp.2427 - 2432, 2009-06 | |
| Surfactant-controlled damage evolution during chemical mechanical planarization of nanoporous films Kim, Taek-Soo; Konno, Tomohisa; Dauskardt, Reinhold H., ACTA MATERIALIA, v.57, no.16, pp.4687 - 4696, 2009-09 | |
| Tailoring UV cure depth profiles for optimal mechanical properties of organosilicate thin films Kim, Taek-Soo; Chumakov, Dmytro; Zschech, Ehrenfried; Dauskardt, Reinhold H., APPLIED PHYSICS LETTERS, v.95, no.7, 2009-08 | |
| Integration Challenges of Nanoporous Low Dielectric Constant Materials Kim, Taek-Soo; Dauskardt, Reinhold H., IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, v.9, no.4, pp.509 - 515, 2009-12 |
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