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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Surfactant-controlled damage evolution during chemical mechanical planarization of nanoporous films Kim, Taek-Soo; Konno, Tomohisa; Dauskardt, Reinhold H., ACTA MATERIALIA, v.57, no.16, pp.4687 - 4696, 2009-09 | |
Tailoring UV cure depth profiles for optimal mechanical properties of organosilicate thin films Kim, Taek-Soo; Chumakov, Dmytro; Zschech, Ehrenfried; Dauskardt, Reinhold H., APPLIED PHYSICS LETTERS, v.95, no.7, 2009-08 |