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Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure Ghim, Young-Sik; Kim, Seung-Woo, APPLIED OPTICS, v.48, no.4, pp.799 - 803, 2009-02 |
Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry Ghim, Young-Sik; Kim, Seung-Woo, OPTICS EXPRESS, v.14, no.24, pp.11885 - 11891, 2006-11 |
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