Browse "ME-Journal Papers(저널논문)" by Subject wafer fabrication

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1
A control method to reduce the standard deviation of flow time in wafer fabrication

Yoon, HJ; Lee, Doo Yong, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.13, no.3, pp.389 - 392, 2000-08

2
Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing

Yim, SJ; Lee, Doo Yong, JOURNAL OF INTELLIGENT MANUFACTURING, v.10, no.6, pp.531 - 540, 1999-06

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