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Fabrication of a high-aspect-ratio nano tip integrated micro cantilever with a ZnO piezoelectric actuator

Lee, SH; Lee, Seung Seob; Choi, JJ; Jeon, JU; Ko, R, ADVANCES IN NONDESTRUCTIVE EVALUATION, PT 1-3 BOOK SERIES: KEY ENGINEERING MATERIALS, v.270-273, pp.1 - 3, 2004

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