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Browse "ME-Journal Papers(저널논문)" by Subject Z-tilts stage

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1	A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air bearings Lee S.-Q.; Gweon, Dae-Gab, PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, v.24, no.1, pp.24 - 31, 2000

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