Browse "ME-Journal Papers(저널논문)" by Subject MICROLENSES
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| Deep X-ray lithography using mask with integrated electrothermal actuator Lee, KC; Lee, Seung Seob, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.11, no.4-5, pp.358 - 364, 2005-04 |
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