Browse "ME-Journal Papers(저널논문)" by Subject INTERFEROMETRIC ACCELEROMETER
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| An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer Teo, Adrian J. T.; Li, Holden; Tan, Say Hwa; Yoon, Yong-Jin, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.27, no.6, 2017-06 |
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