Browse "ME-Journal Papers(저널논문)" by Subject COPPER CMP

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1
Pad Scratching in Chemical-Mechanical Polishing: The Effects of Mechanical and Tribological Properties

Kim, Sanha; Saka, Nannaji; Chun, Jung-Hoon, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.3, no.5, pp.P169 - P178, 2014-04

2
Scratching of Patterned Cu/Dielectric Surface Layers by Pad Asperities in CMP

Kim, Sanha; Saka, Nannaji; Chun, Jung-Hoon, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.28, no.1, pp.96 - 105, 2015-02

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