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Thermally/mechanically robust anodic aluminum oxide (AAO) microheater platform for low power chemoresistive gas sensor

Lee, Byeongju; Cho, Incheol; Kang, Mingu; Yang, Daejong; Park, Inkyu, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.33, no.8, 2023-08

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