Browse "ME-Journal Papers(저널논문)" by Subject 노광 장비

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리소그라피 장비에서 XYtheta 미세구동기의 최적 설계 및 제어

Kim, Dong Min; Kim, Ki Hyun; Lee, Sung Q; Gweon, Dae Gab, Journal of the Korean Society for Precision Engineering, Vol.19, No.12, 2002-12

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